LSR Series

LSR1000

• Bonding accuracy: < ± 5.0µm

• Laser: ~1kW, 1Head

• Power Tunability: 10 ~ 100%

• Beam Size Range: 4 to 45mm

• Beam Shape: Rectangular, Square

• Wave length: IR

• Monitoring: IR camera, Beam profiler

• Footprint: 1.7 x 1.8 meter, 2,500kg